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Investigations on an integrated optical position detection of micromachined scanning mirrors

 
: Schuster, T.; Sandner, T.; Lakner, H.

:

Borkowska, A.:
Proceedings of 2006 International Students and Young Scientists Workshop "Photonics and Microsystems" & British Council International Networking for Young Scientists Meeting "Photonics, Optoelectronics, Nanotechnology" : Wroclaw, June 30 - July 2, 2006
Piscataway, NJ: IEEE Operations Center, 2006
ISBN: 1-424-40392-8
pp.55-58
International Students and Young Scientists Workshop Photonics and Microsystems <2006, Wroclaw>
British Council International Networking for Young Scientists Meeting Photonics, Optoelectronics, Nanotechnology <2006, Wroclaw>
International Optoelectronics Workshop <2006, Wroclaw>
English
Conference Paper
Fraunhofer IPMS ()

Abstract
The micro scanning mirrors developed at the Fraunhofer Institute of Photonic Microsystems (IPMS) are a mechanical resonant, electrostatic driven system. The knowledge of the current deflection angle of the mirror plate is necessary to provide stability of the oscillation and to get information about the direction and amplitude of the deflection. Therefore several designs of miniaturized position detection have been developed.

: http://publica.fraunhofer.de/documents/N-171755.html