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MEMS-based compact FT-Spectrometers-A platform for spectroscopic mid-infrared sensors

: Kraft, M.; Kenda, A.; Sandner, T.; Schenk, H.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2008, the Seventh IEEE Conference on Sensors : October 26-29, 2008, Lecce (Italy)
New York, NY: IEEE, 2008
ISBN: 1-4244-2581-5
ISBN: 978-1-4244-2580-8
Conference on Sensors <7, 2008, Lecce/Italien>
Conference Paper
Fraunhofer IPMS ()

Novel low-voltage driven translational MEMS micro- mirror components are used to build a fully portable Fourier-Transform spectrometer. Applying nearly inertia-less MEMS devices to modulate the IR light allows building highly compact spectrometers with sub-millisecond scan times that are immune to shock and vibrations. Compact, energy efficient and robust, MEMS-based spectrometers can thus act as transducers for spectroscopic IR sensors deployable in the field. The devices shown can be used to qualitatively and quantitatively measure absorbance and/or emission spectra, even of transient signals and in real time, over a wide spectral range. This allows making full use of the inherent multi-analyte detection capabilities of spectroscopic sensors, giving this spectroscopy platform a significant advantage over single-wavelength IR sensors. When combined with already available fibre-optic sensor probes, the resulting sensors could open new application fields for smart sensors.