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Elastic properties of nano - thin films by use of atomic force acoustic microscopy

: Kopycinska-Müller, M.; Striegler, A.; Hürrich, A.; Köhler, B.; Meyendorf, N.; Wolter, K.-J.

Tamura, N. ; Materials Research Society -MRS-:
Probing mechanics at nanoscale dimensions : Symposium held April 14 - 17, 2009, San Francisco, California, U.S.A.; Symposium II, "Probing Mechanics at Nanoscale Dimensions" held at the 2009 MRS spring meeting
Warrendale, Pa.: MRS, 2009 (Materials Research Society Symposium Proceedings 1185)
ISBN: 978-1-605-11158-2
ISSN: 0272-9172
Materials Research Society (Spring Meeting) <2009, San Francisco/Calif.>
Symposium II "Probing Mechanics at Nanoscale Dimensions" <2009, San Francisco/Calif.>
Conference Paper
Fraunhofer IPMS ()

Atomic force acoustic microscopy (AFAM) is a non-destructive method able to determine the indentation modulus of a sample with high lateral and depth resolution. We used the AFAM technique to measure the indentation modulus of film-substrate systems Msam and then to extract the value of the indentation modulus of the film Mf. The investigated samples were films of silicon oxide thermally grown on silicon single crystal substrates by use of dry and wet oxidation methods. The thickness of the samples ranged from 7 nm to 28 nm as measured by ellipsometry. Our results clearly show that the values of Msam obtained for the film-substrate systems depended on the applied static load and the film thickness. The observed dependency was used to evaluate the indentation modulus of the film. The values obtained for M f ranged from 77 GPa to 95 GPa and were in good agreement with values reported in the literature.