Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Heterogeneous integration for optical MEMS

: Fischer, A.; Forsberg, F.; Lapisa, M.A.; Roxhed, N.; Stemme, G.; Zimmer, F.; Niklaus, F.


IEEE Photonics Society:
23rd Annual Meeting of the IEEE Photonics Society 2010 : 7-11 Nov. 2010, Denver, CO, USA
New York, NY: IEEE, 2010
ISBN: 978-1-4244-5368-9
ISBN: 978-1-4244-5369-6
IEEE Photonics Society (Annual Meeting) <23, 2010, Denver/Colo.>
Conference Paper
Fraunhofer IPMS ()

In this paper we present different large-scale heterogeneous integration technologies for optical MEMS that enable the integration of optical MEMS with standard CMOS-based ICs. Examples that are presented include various monocrystalline silicon micro-mirror arrays and infrared bolometer arrays.