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Translatory MEMS actuator with extraordinary large stroke for optical path length modulation

 
: Sandner, T.; Grasshoff, T.; Schenk, H.

:

IEEE Photonics Society:
International Conference on Optical MEMS and Nanophotonics, OPT MEMS 2010 : 9-12 Aug. 2010
Piscataway: IEEE, 2010
ISBN: 978-1-4244-8925-1
ISBN: 978-1-4244-8926-8
pp.25-26
International Conference on Optical MEMS and Nanophotonics <2010, Sapporo>
English
Conference Paper
Fraunhofer IPMS ()

Abstract
A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers - is presented for the first time. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm2 aperture using four pantographs. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 500 Hz amplitude has been measured in vacuum of 50 Pa and 90 V driving voltage.

: http://publica.fraunhofer.de/documents/N-171724.html