Options
2010
Conference Paper
Titel
Lamellar grating based mems fourier transform spectrometer
Abstract
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10mm2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 m is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.