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High speed laser micro-machining using a high repetition rate, high average power femtosecond fiber CPA system

: Ancona, A.; Rademaker, K.; Röser, F.; Limpert, J.; Nolte, S.; Tünnermann, A.

Broeng, J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Fiber lasers V. Technology, systems, and applications : 21 - 24 January 2008, San Jose, California, USA
Bellingham, WA: SPIE, 2008 (Proceedings of SPIE 6873)
ISBN: 978-0-8194-7048-5
Conference "Fiber Lasers - Technology, Systems, and Applications" <5, 2008, San Jose/Calif.>
Conference Paper
Fraunhofer IOF ()

We report on ultrashort pulse laser micromachining experiments on different metals at average powers up to 70 W and repetition rates up to 1 MHz. The laser pulses with subpicosecond duration were generated by an ultrafast fiber CPA laser system. The influence of particle shielding and heat accumulation on the ablation efficiency and on the processing quality will be discussed.