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2010
Conference Paper
Titel
Aerosol printed conductors for miniaturized LTCC packaging
Abstract
For miniaturized electronic packages in low temperature co-fired ceramics (LTCC) aerosol printing technology was used to deposit conductor lines with a microscaled silver ink. A DoE (Design of Experiments) method was used to identify significant process parameters and to optimize the quality of the deposited films. The results showed that there is a high percentage of interaction between the gas flows and the deposition rate on the width of the line. The electric characteristics (Rsqr, TCR) as well as the microstructure of the aerosol printed, co-fired inner conductors were investigated and are comparable to screen printed conductor lines.