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Virtual equipment engineering: A novel approach for the integrated development of semiconductor manufacturing equipment

 

American Society of Mechanical Engineers -ASME-, Design Engineering Division; American Society of Mechanical Engineers -ASME-, Computers and Information in Engineering Division -CIE-:
ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009. Proceedings. Vol.2. Pt.A : Presented at 2009 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, August 30 - September 2, 2009, San Diego, California, USA
New York/NY.: ASME, 2010
ISBN: 978-0-7918-4899-9
pp.541-547
International Design Engineering Technical Conferences (IDETC) <2009, San Diego/Calif.>
Computers and Information in Engineering Conference (CIE) <2009, San Diego/Calif.>
English
Conference Paper
Fraunhofer IISB ()

Abstract
An innovative approach for the integrated and virtual development of new semiconductor manufacturing equipment is presented in this paper: Virtual Equipment Engineering (VEE). This new concept allows for the intelligent coupling of CAD with existing and novel simulation methods of the equipment development process towards a flexibly configurable integrated system. The main objective of VEE is to forecast the influence of development measures on the process and on the final device characteristics in the very early development stages of new equipment. Therefore, VEE follows a holistic view on equipment and processes to offer an integrated and adaptable development environment and a consistent simulation of equipment, process, process chain, and final devices. The major challenge in realizing this approach is the provision of a continuous, consistent, and persistent simulation chain. One possible solution dealing with this challenge is being developed and presented in this paper.

: http://publica.fraunhofer.de/documents/N-170925.html