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The impact of helium co-implantation on hydrogen induced donor profiles in float zone silicon

 
: Laven, J.G.; Job, R.; Schulze, H.-J.; Niedernostheide, F.-J.; Häublein, V.; Schulze, H.; Schustereder, W.; Ryssel, H.; Frey, L.

Electrochemical Society -ECS-:
218th ECS meeting abstracts 2010. Vol.2 : Las Vegas, Nevada, USA, 10 - 15 October 2010
Red Hook, NY: Curran, 2011
ISBN: 978-1-617-82094-6
pp.1557
Electrochemical Society (Meeting) <218, 2010, Las Vegas/Nev.>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-170917.html