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Innovations in structured thin film design and fabrication for optical applications

: Qi, H.; Wang, J.; Erdmann, A.; Jin, Y.; Shao, J.; Fan, Z.


Chu, J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Seventh International Conference on Thin Film Physics and Applications, TFPA 2010 : 24 - 27 September 2010, Shanghai, China
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7995)
ISBN: 978-0-8194-8568-7
Paper 799519
International Conference on Thin Film Physics and Applications (TFPA) <7, 2010, Shanghai>
Conference Paper
Fraunhofer IISB ()

This paper presents the design and fabrication of several versions of structured thin films (STF). One kind of STF is a sculptured thin film, generally deposited with a glancing angle deposition technique. Several optical components were designed and fabricated using this technique. This includes a TiO2 based wave-plate for an operating wavelength of 550 nm, a multilayer based beam splitter with a transmittance of 75.0% for TM light and 38.6% for TE light at 632 nm, and a multilayer based polarization neutral transmission filter for an incidence angle of 45°. Multilayer dielectric gratings (MDG) present another type of STF. To obtain a broad diffraction bandwidth, a novel MDG structure with three materials is proposed. Using multi-parameter optimization, a broadband spectrum with an efficiency >97.5% and a bandwidth >100 nm centered at 800 nm was obtained. For the first time, a new type of two-dimensional (2D) MDG is proposed to obtain higher efficiency (>98%) and broader bandwidth (>110 nm). Finally, the designs of pulse compression gratings and of broadband polarizers, which can be fabricated with a single material, are presented.