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Structural investigation of growth and dissolution of Inx Ga1 - x N nano-islands grown by molecular beam epitaxy

: Pretorius, A.; Yamaguchi, T.; Kübel, C.; Kröger, R.; Hommel, D.; Rosenauer, A.


Journal of Crystal Growth 310 (2008), No.4, pp.748-756
ISSN: 0022-0248
Journal Article
Fraunhofer IFAM ()

Free-standing nanometre sized Inx Ga1 - x N islands and islands capped with thin GaN layers were grown by molecular beam epitaxy (MBE) and characterised by high resolution transmission electron microscopy (HRTEM). By adjusting the growth temperature of the Inx Ga1 - x N islands, deposition of the wurtzite modification was realised. The obtained free-standing islands are plastically relaxed by approximately equidistant misfit dislocations. For capped samples, the GaN cap layer thickness was varied between nominal thicknesses of 2 nm and 8 nm. Already for a 2 nm thick cap layer, strong dissolution of the islands occurred. In case of the 8 nm thick GaN cap layer, all former islands are dissolved, and an InGaN layer of approximately homogeneous indium concentration is observed.