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Electron tomography of nanostructured materials - Towards a quantitative 3D analysis with nanometer resolution

: Kübel, C.; Niemeyer, D.; Cieslinski, R.; Rozeveld, S.


Chandra, T.; Wanderka, N.; Reimers, W.:
THERMEC 2009, 6th International Conference on Processing & Manufacturing of Advanced Materials. Pt.1 : Berlin, Germany, August 25 - 29, 2009
Stafa-Zürich: Trans Tech Publications, 2010 (Materials Science Forum 638-642)
ISBN: 978-0-87849-294-7
International Conference on Processing & Manufacturing of Advanced Materials (THERMEC) <6, 2009, Berlin>
Conference Paper
Fraunhofer IFAM ()

Electron tomography has developed into a powerful technique to image the 3D structure of complex materials with nanometer resolution. Both, TEM and HAADF-STEM tomography exhibit tremendous possibilities to visualize nanostructured materials for a wide range of applications. Electron tomography is not only a qualitative tool to visualize nanostructures, but recently electron tomographic results are also exploited to obtain quantitative measurements in 3D. We evaluated the reconstruction and segmentation process for a heterogeneous catalyst and, in particular, tried to assess the reliability and accuracy of the quantification process. Furthermore, a quantitative analysis of electron tomographic results was compared to macroscopic measurements.