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Modeling LTCC-based microchannels using a network approach

: Schlottig, G.; Rebenklau, L.; Uhlemann, J.; Nytsch-Geusen, C.; Wolter, K.-J.


TU Dresden, Institut für Aufbau- und Verbindungstechnik der Elektronik -IAVT-; Institute of Electrical and Electronics Engineers -IEEE-:
1st Electronics Systemintegration Technology Conference, ESTC 2006. Vol.2 : Dresden, 5.-7.9.2006
New York, NY: IEEE, 2006
ISBN: 1-4244-0552-1
ISBN: 1-4244-0553-X
Electronics Systemintegration Technology Conference (ESTC) <1, 2006, Dresden>
Conference Paper
Fraunhofer FIRST ()

Low temperature cofiring ceramic (LTCC) combines hybrid technology, biocompatibility, chemical resistance and ease of fabrication to serve as a construction material for microfluidics. Due to the lack of CAD tools for MEMS this paper applies a model for the description of stationary flow in LTCC channels of non circular cross sections. Sample devices for validation are fabricated by laser structuring and standard LTCCprocess. The substrates consist of 130 m thick layers and are connected horizontally to a tubing system. Characteristic length scales range between 131 m and 159 m. Deviations stay within the assumed uncertainty and confirm the theory. Results show that applying solutions of geometry description in accepted fluid mechanics models gives an appropriate tool for flow description. Implementing the model as a network description in the describing language MOSILAB can allow dimensioning and optimization under functional restrictions, e.g. pressure drop or geometr y as well as communication with other modeling tools.