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Investigation of boron delta-layers in silicon measured by atom probe tomography (APT)
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2009
Conference Paper
Titel
Investigation of boron delta-layers in silicon measured by atom probe tomography (APT)
Author(s)
Klein, C.
Mutas, S.
Würfel, A.
Zschech, E.
Hauptwerk
Microscopy and microanalysis 2009. Proceedings
Konferenz
Microscopy Society of America (Annual Meeting) 2009
Microbeam Analysis Society (Annual Meeting) 2009
International Metallographic Society (Annual Meeting) 2009
DOI
10.1017/S1431927609093945
Language
English
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