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Joining challenges in the packaging of BioMEMS

 
: Herfurth, H.J.; Witte, R.; Heinemann, S.; Newaz, G.; Mian, A.; Georgiev, D.; Auner, G.

Patel, R.:
Laser Materials Processing Conference, Laser Microfabrication Conference, ICALEO 2004, 23rd International Congress on Applications of Lasers & Electro-Optics. Congress proceedings. CD-ROM : October 4 - 7, 2004, San Francisco Airport Marriott, San Francisco, California, USA
Orlando, Fla.: LIA, 2004 (LIA publication 597 = 97)
ISBN: 0-912035-77-3
ISBN: 978-0-912035-77-2
Paper M508
Laser Materials Processing Conference <2004, San Francisco/Calif.>
Laser Microfabrication Conference <2004, San Francisco/Calif.>
International Congress on Applications of Lasers and Electro Optics (ICALEO) <23, 2004, San Francisco/Calif.>
English
Conference Paper
Fraunhofer ILT ()

Abstract
Micro-joining and hermetic sealing of dissimilar and biocompatible materials is a critical issue for a broad spectrum of products such as micro-electronical, micro-optical and biomedical products and devices. Novel implantable microsystems currently under development will include functions such as localized sensing of temperature and pressure, electrical stimulation of neural tissue and the delivery of drugs. These devices are designed to be long-term implants that are remotely powered and controlled. The development of new, biocompatible materials and manufacturing processes that ensure long-lasting functionality and reliability are critical challenges. Important factors in the assembly of such systems are the small size of the features, the heat sensitivity of integrated electronics and media, the precision alignment required to hold small tolerances, and the type of materials and material combinations to be hermetically sealed. Laser micromachining has emerged as a compelling solution to address these manufacturing challenges. This paper will describe the latest achievements in microjoining of non-metallic materials. The focus is on glass, metal and polymers that have been joined using CO2, Nd:YAG and diode lasers. Results in joining similar and dissimilar materials in different joint configurations are presented, as well as requirements for sample preparation and fixturing. The potential for applications in the biomedical sector will be demonstrated.

: http://publica.fraunhofer.de/documents/N-168991.html