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Large area direct fabrication of periodic arrays using interference patterning

: Lasagni, A.F.; Rocha, T.; Langheinrich, D.; Bieda, M.; Wetzig, A.

Postprint (966 KByte; PDF; )

Schmidt, M. ; Wissenschaftliche Gesellschaft Lasertechnik -WLT-:
Lasers in Manufacturing 2011, Sixth International WLT Conference on Lasers in Manufacturing. Proceedings : May 23-26, 2011, München; LiM 2011
Amsterdam: Elsevier, 2011 (Physics Procedia 12. 2011, Pt.2)
ISSN: 1875-3892
International Conference on Lasers in Manufacturing (LIM) <6, 2011, München>
Conference Paper, Journal Article, Electronic Publication
Fraunhofer IWS ()

In this study, we introduce a recently developed approach for the fabrication of two and three dimensional structures using Direct Laser Interference Patterning (DLIP). Different periodic arrays were fabricated on polymers, resists and carbon like layers using a nanosecond pulsed laser system. The fabricated structures range from the submicrometer (~180 nm) to micrometer (~10 micro-m) range, and its resolution (minimal achievable feature size) depends basically on interaction nature of the laser light with the processed material, as well as the utilized wavelength and laser processing parameters. Different examples of fabricated arrays and their applications are discussed.