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CMP issues arising from novel materials and concepts in the BEOL of advanced Microelectronic Devices
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2007
Conference Paper
Titel
CMP issues arising from novel materials and concepts in the BEOL of advanced Microelectronic Devices
Author(s)
Gottfried, Knut
Schubert, I.
Schulze, K.
Schulz, Stefan E.
Geßner, Thomas
Hauptwerk
ICPT 2007, International Conference on Planarization/CMP Technology. Proceedings
Konferenz
International Conference on Planarization, CMP Technology (ICPT) 2007
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS