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Improvement of etch processes for SiCOH materials with novel in situ diagnostic and evaluation methods

 
: Zimmermann, S.; Ahner, N.; Blaschta, F.; Schaller, M.; Zimmermann, H.; Rülke, H.; Lang, N.; Röpcke, J.; Schulz, S.E.; Gessner, T.

Edelstein, D.C. (Hrsg.) ; Materials Research Society -MRS-; Univ. of California, Continuing Education in Engineering:
Advanced Metallization Conference, AMC 2009 : Proceedings of the conference held October, 13 - 15, 2009, Baltimore, Maryland, U.S.A.
Warrendale, Pa.: MRS, 2009
ISBN: 978-1-605-11218-3
pp.101-110
Advanced Metallization Conference (AMC) <26, 2009, Baltimore/Md.>
English
Conference Paper
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/documents/N-167512.html