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Growth of Ag films on PET deposited by magnetron sputtering

: Charton, C.; Fahland, M.


Vacuum 68 (2002), No.1, pp.65-73
ISSN: 0042-207X
Journal Article
Fraunhofer FEP ()
Ag film; magnetron sputtering; PET substrate; SEM; AFM; XRD; growth mode; percolation threshold; film thickness; surface diffusion; Ag

Thin Ag films grown under varying deposition conditions are analysed by means of SEM, AFM and XRD measurements. The films are deposited onto a Polyethylene terephthalate web by DC magnetron sputtering. The extent to which the deposition conditions influence the growth mode of the Ag films is examined. The electron micrographs clearly show that the percolation threshold as well as the film thickness at which a closed film is formed, are dependent on the Ar pressure during deposition. The influence of the Ar pressure during deposition on the film growth is discussed in terms of the amount of energy deposited into the film during the growth process and the resulting influence on surface diffusion processes.