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Displacement and strain field measurements for nanotechnology applications

: Vogel, D.; Keller, J.; Gollhardt, A.; Michel, B.


IEEE Robotics and Automation Society:
2nd IEEE Conference on Nanotechnology 2002. Proceedings : August 26 - 28, Washington, D.C.
Piscataway: IEEE Operations Center, 2002
ISBN: 0-7803-7538-6
Conference on Nanotechnology <2, 2002, Washington/DC>
Conference Paper
Fraunhofer IZM ()
displacement; strain field measurement; nanotechnology application; measurement method; incremental displacement; scanning force micrograph; object state; local cross correlation algorithm; displacement computation; microcrack evaluation; particle motion tracking

The paper introduces a measurement method, which allows one to determine the incremental displacement and strain fields from Scanning Force Micrographs of different object states. Local cross correlation algorithms form the basis of the displacement computation. Capabilities and presumptions of the new method are discussed. Application features are demonstrated by the example of microcrack evaluation. Prospects for particle motion tracking by the tool are considered.