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2002
Conference Paper
Title

Displacement and strain field measurements for nanotechnology applications

Abstract
The paper introduces a measurement method, which allows one to determine the incremental displacement and strain fields from Scanning Force Micrographs of different object states. Local cross correlation algorithms form the basis of the displacement computation. Capabilities and presumptions of the new method are discussed. Application features are demonstrated by the example of microcrack evaluation. Prospects for particle motion tracking by the tool are considered.
Author(s)
Vogel, D.
Keller, J.
Gollhardt, A.
Michel, B.
Mainwork
2nd IEEE Conference on Nanotechnology 2002. Proceedings  
Conference
Conference on Nanotechnology 2002  
DOI
10.1109/NANO.2002.1032118
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
Keyword(s)
  • displacement

  • strain field measurement

  • nanotechnology application

  • measurement method

  • incremental displacement

  • scanning force micrograph

  • object state

  • local cross correlation algorithm

  • displacement computation

  • microcrack evaluation

  • particle motion tracking

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