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New materials and technologies for micromachined metal oxide gas sensor arrays

: Wöllenstein, J.; Böttner, H.; Plaza, J.A.; Cane, C.

Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2002. Proceedings. Vol.1 : First IEEE International Conference on Sensors, June 12 - 14, 2002, Hyatt Orlando, Orlando, Florida, U.S.A.
Piscataway, NJ: IEEE Operations Center, 2002
ISBN: 0-7803-7454-1
International Conference on Sensors <1, 2002, Orlando/Fla.>
Conference Paper
Fraunhofer IPM ()
micromachined metal oxide gas sensor array; metal oxide gas sensor array; Si micromachined heater platform; low power heater platform; gas sensitive metal oxide; n-type; microhotplate; Si; ZnO; CrTiO

We present a new silicon micromachined low power heater platform comprising sensor arrays which feature a number of different gas sensitive metal oxides. The sensing elements of the arrays are composed of alternatively n-type SnO/sub 2/, n-type WO/sub 3/, n-type ZnO, p-type Cr/sub 1.8/Ti/sub 0.2/O/sub 3+z/ or n-type V/sub 2/O/sub 5/. Characterisation of the arrays under trace gas exposure is presented.