Options
2002
Journal Article
Titel
Testing of large area microstructured surfaces - challenges through new production technologies
Abstract
By the developments in ultra precision micro machining appreciable progress could be achieved in the production of large area micro- structured molds. With the help of these tools light steering films for computer displays or space-saving lighting concepts can be realized economically. On the other hand innovative production concepts cohere with new challenges for the quality control of the production process. For the production of large area micro-structured surfaces measuring procedures are needed, which are able to characterize complex surface geometries in optical quality fast and as close as possible to the machine. Thus, the main tasks are the measurement of steep slopes and the reduction of measurement time. The presented solutions are based on the systematic tilting of microstructured parts and the use of flexible lighting concepts to make surface geometries with steep slopes measurable. Another concept is based on the transfer of the interferometric form testing to the field of microstructures. A fast and automated interferometric form testing of microprism and microsphere arrays is presented.
Author(s)