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Inorganic-organic hybrid materials (ORMOCER®s) for multilayer technology - passivation and dielectric behavior

: Houbertz, R.; Fröhlich, L.; Schulz, J.; Popall, M.

Jabbour, G.E.:
Electronic, optical and optoelectronic polymers and oligomers : Symposium held April 17 - 20, 2001, San Francisco, California, U.S.A., Symposium on Electronic, Optical and Optoelectronic Polymers and Oligomers was held at the 2001 MRS spring meeting
Warrendale, Pa.: Materials Research Society, 2002 (Materials Research Society Symposium Proceedings 665)
ISBN: 1-558-99601-X
Symposium on Electronic, Optical and Optoelectronic Polymers and Oligomers <2001, San Francisco/Calif.>
Conference Paper
Fraunhofer ISC ()
inorganic organic hybrid material; multilayer technology passivation; dielectric behavior; sol-gel processing; physical properties; chemical property; electronic; optic; negative resist behavior; UV exposure; resolution; thick film; coating technology; dielectric property; adhesion; permittivity; dielectric strength; Young's modulus; reflow soldering stability; degradation; water uptake; water vapor permeation

Inorganic-organic hybrid polymers (ORMOCER(R)s) have been synthesized by sol-gel processing. The materials can be functionalized such that their physical and chemical properties can be reproducibly tailored towards the desired application, i.e., electronics, optics (passives/actives) or passivation technology. Besides, the materials which show negative resist behavior, can be patterned by UV exposure with good resolution. The materials are well-suited for thin and thick film technology using conventional coating technology, applied in multi-layer technology. We here particularly focus on materials for passivation against environmental influences, which additionally exhibit very good dielectric properties.