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  4. Macroparticle filtering of high-current vacuum arc plasmas
 
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1996
Conference Paper
Title

Macroparticle filtering of high-current vacuum arc plasmas

Abstract
The transport of vacuum arc plasmas through a 90o curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the range of a few kA, exceeding considerably the level of what has been reported in literature. The main question investigated was wether magnetic macroparticle filters could be scaled-up and simultaneously maintaining the transport efficiency of small filters. In front of the cathode we found arc-current-depending total ion saturation currents in the range from 10 to 23% of the arc current. The best transport efficiency was 25% (time integrated output / time intgrated input) at a duct wall bias of 25.5 V and at an axial magnetic field of about 100 mT. This is comparable to what has been observed with other, low-current filters.
Author(s)
Schülke, T.
Anders, A.
Siemroth, P.
Mainwork
XVII.International Symposium on Discharges and Electrical Insulation in Vacuum 1996. Proceedings  
Conference
International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) 1996  
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Bogentechnologie

  • PVD

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