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The Quality Chain for (U)HP Media and Joint Media in its Meaning

Die Qualitaetskette von ultrahochreinen Medien und Joint Media in seiner Bedeutung
: Dorner, J.; Matuscheck, P.; Ernst, C.

Dorner, J. ; Fraunhofer-Institut für Produktionstechnik und Automatisierung -IPA-, Stuttgart; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.:
Quo Vadis Media : 1st Technical Conference Ultra-Pure Media, November 2-3, 1999, Dresden, Germany. Joint Media - An European Initiative in the Field of Ultra-Pure Media for the Manufacture of Semiconductors
Stuttgart, 1999
Technical Conference Ultra-Pure Media <1, 1999, Dresden>
Conference Paper
Fraunhofer IPA ()
Reinstmedien; Reinstwasser; Reinstgas; Reinstflüssigkeit; Reinstchemikalien; Joint Media; Qualitätskette; Industriekonsortium; Quality Chain; High Purity Media; Industry Consortium; semiconductor; Reinraum; Halbleiter; Fertigung

From the beginning of mass production of semiconductor devices until now the most important basic materials beside the semiconductor materials themselves have to keep up with the increasing demands of the ongoing technological progress. (Ultra) high purity gases, liquids and chemicals were and are necessary to etch, to deposit, to dope, to clean and to protect the semiconductor materials in regard of manufacturing the complex structures of semiconductor devices (e.g. integrated circuit, flat panel display). Since the invention of the first discrete transistor based on semiconductors to the present state-of-the-art highest integrated logical processor a long path has been covered. This path has been one of improving and developing the production, the handling, the properties and first of all the quality of all kinds of (ultra) high purity edia used in semiconductor industries leading to the Quality Chain. The problems and challenges of the quality chain are the main driving forces for European producers, suppliers and users of (ultra) high purity media and the media supply components. Since the end of the eighties European enterprises have increasingly worked together to remain competitive in the world-wide, ever-increasing semiconductor market and to keep up with the technological developments. The foundation of the Initiative " Joint Media" interest group at the end of 1996 was the logical consequence of the previous allied projects. The Microproduction department of the Fraunhofer Institute for Manufacturing Engineering and Automation (IPA) has undertaken the co-ordination as far as contents and organisation are concerned. The article explains the Quality Chain and gives an overview over the work for Joint Media.