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Sequential combination of micro-milling and laser structuring for manufacturing of complex micro-fluidic structures

Prozesskombination von Mikrofräs- und Laserstrukturierung für die Bearbeitung komplexer Mikrofluidstrukturen
 
: Schubert, Andreas; Groß, Stefan; Schulz, Bertram; Eckert, Udo

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Preprint urn:nbn:de:0011-n-1645451 (1.3 MByte PDF)
MD5 Fingerprint: f09fdab80d12361bae23683c9b503e23
Created on: 9.6.2011


Schmidt, M. ; Wissenschaftliche Gesellschaft Lasertechnik -WLT-:
Lasers in Manufacturing 2011, Sixth International WLT Conference on Lasers in Manufacturing. Proceedings : May 23-26, 2011, München; LiM 2011
Amsterdam: Elsevier, 2011 (Physics Procedia 12. 2011, Pt.2)
ISSN: 1875-3892
pp.221-229
International Conference on Lasers in Manufacturing (LIM) <6, 2011, München>
English
Conference Paper, Journal Article, Electronic Publication
Fraunhofer IWU ()
laser; milling; sequential combination; microfluidic; micro manufacturing

Abstract
This paper deals with the combination of micro milling and laser micro structuring for processing hot embossing dies for microfluidic applications. This strategy permits the advantages of each process technology to be exploited in order to achieve a cost and time efficient process and also to process forms and structures which cannot be manufactured with the single processes micro milling and laser micro structuring. Basic requirements are a high-precision positioning of the single process areas and also a good machining of the parts and structures with the manufacturing processes micro milling and laser micro structuring. The intersections between the different processing areas present a challenge for this process technology.

: http://publica.fraunhofer.de/documents/N-164545.html