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Endurance analysis of optical master stamps for UV-replication

: Wippermann, F.C.; Reimann, A.; Leibeling, G.


Maher, M.-A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining and Microfabrication Process Technology XVI : SPIE Photonics West, 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7926)
ISBN: 978-0-8194-8463-5
Paper 792603
Conference "Micromachining and Microfabrication Process Technology" <16, 2011, San Francisco/Calif.>
Conference Paper
Fraunhofer IOF ()

The fabrication of optical components based on UV-replication is spreading rapidly in the field of high volume and low cost production. Hereby, a master stamp providing optical surface quality is imprinted into a liquid polymer material which can be cured under UV-exposure. Most prominent is the fabrication of miniaturized camera objectives for mobile phone applications done on wafer level. The required lens surfaces possess high sag and aspherical shape which leads to a challenging fabrication of the master stamp which consists of an array of identical convex or concave optical surfaces. We analyze the endurance of the stamp used in a step & repeat process for the fabrication of array-like structures used as master molds for UV-replication.