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Inkjet printing of titanium doped chromium oxide for gas sensing application

: Peter, C.; Kneer, J.; Wöllenstein, J.


Sensor letters 9 (2011), No.2, pp.807-811
ISSN: 1546-198X
International Meeting on Chemical Sensors (IMCS) <13, 2010, Perth>
Journal Article, Conference Paper
Fraunhofer IPM ()
metal oxide gas sensor; inkjet printing; CTO

A novel deposition technique based on inkjet-technology has been developed for manufacturing gas-sensitive layers of titanium doped chromium oxide (Cr2−xTixO3+z, CTO). A stable dispersion, carrying CTO particles in defined sizes, has been tuned for printing, concerning its rheological properties. Therefore the CTO was prepared by using the solid-state reaction between Cr2O3 and TiO2 powders during sintering at temperatures exceeding 1000 °C. The aqueous CTO ink was developed in a ball milling process. A great variety of layers in different formations were printed. The structures were analysed concerning morphology, topography and lateral resolution. Achievable layer thicknesses were determined. High roughness and a porous morphology are characteristic of the layers. Different possibi lities for printing gas sensitive patterns are presented. Prototypes were assembled and their gas-sensitive behaviour to different test gases has been investigated. Correlations between layout and the response of the layers were observed. Free-standing structures and porous morphology offer a high-sensitive sensor performance.