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Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation

: Sandner, T.; Grasshoff, T.; Schenk, H.; Kenda, A.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems X : SPIE Photonics West, 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7930)
ISBN: 978-0-8194-8467-3
Paper 79300I
Conference "MOEMS and Miniaturized Systems" <10, 2011, San Francisco/Calif.>
Conference Paper
Fraunhofer IPMS ()
optical SOI-MEMS; translatory micro mirror; optical path length modulation; fourier-transform infrared spectrometers; optical vacuum packaging

A translatory MOEMS actuator with extraordinary large stroke - especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers - is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of a new suspension design of the comparative large mirror plate with 19.6 mm² aperture using four pantographs. The MOEMS device is driven electro - statically resonant and is manufactured in a CMOS compatible SOI process. Up to ± 600 um amplitude (typically 1mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency.