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Optical position feedback and phase control of resonant 1D and 2D MOEMS-scanners

 
: Tortschanoff, A.; Frank, A.; Wildenhain, M.; Tetikol, H.S.; Sandner, T.; Schenk, H.; Kenda, A.

:

Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems X : SPIE Photonics West, 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7930)
ISBN: 978-0-8194-8467-3
Paper 79300S
Conference "MOEMS and Miniaturized Systems" <10, 2011, San Francisco/Calif.>
European Commission EC
FP7-ICT; 248623; TACO
English
Conference Paper
Fraunhofer IPMS ()
MOEMS; scanner mirror; closed loop; optical feedback; position sensing; electrostatic driving

Abstract
Resonantly driven oscillating MOEMS mirrors have many applications in the fields of optics, telecommunication and spectroscopy. Assuring stable resonant oscillation with well controlled amplitude under varying environmental conditions is a complex task, which can impede or retard incorporation of such MOEMS mirrors in large systems. For this we have developed compact modules comprising optical position sensing and driver electronics with closed loop control, which can ensure stable resonant operation of 1D and 2D micro-mirrors. In this contribution we present in much detail the position encoding and feedback scheme, and show very first experimental results with the novel 2D device.

: http://publica.fraunhofer.de/documents/N-162248.html