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Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

: Grahmann, J.; Graßhoff, T.; Conrad, H.; Sandner, T.; Schenk, H.


Schenk, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems X : SPIE Photonics West, 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7930)
ISBN: 978-0-8194-8467-3
Paper 79300V
Conference "MOEMS and Miniaturized Systems" <10, 2011, San Francisco/Calif.>
European Commission EC
FP7-ICT; 248623; TACO
Conference Paper
Fraunhofer IPMS ()
MOEMS; scanning micromirror; piezoresistive; position sensor; angular sensor; optical SOI-MEMS

We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 µm thick p-doped layer of NA about 10(exp 17) cm-3 into the lowly p-doped SOI device layer of NA about 10(exp 15) cm-3. This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.