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Phase retrieval algorithm for form testing metrology in production environment

 
: Stürwald, S.; Schmitt, R.

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Journal of Systemics, Cybernetics and Informatics 8 (2010), No.4, pp.42-47
ISSN: 1690-4524
English
Journal Article, Electronic Publication
Fraunhofer IPT ()

Abstract
Form testing interferometry permits a fast, non-tactile and full- field quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT- based spatial carrier phase measurement technique (SCPM) which requires only a single interferogram recording. The utilization of a generalized, relatively new spatial phase-shifting method operating in the position space opens up prospects for reduced phase noise and less reconstruction errors of the calculated phase-map under production conditions. Therefore this phase-shifting technique is investigated for applicability in machine integrated interferometric form testing of optical lenses. A characterization of the algorithm and a comparison with the commonly used FT-based algorithm is performed. As a reference, measurements are carried out with a coordinate measuring machine with nanometre accuracy.

: http://publica.fraunhofer.de/documents/N-162184.html