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Structural and mechanical characterization of carbon nanocomposite film

Strukturelle und mechanische Charakterisierung von Kohlenstoff-Nanokomposit-Schichten

IEEE transactions on plasma science 25 (1997), No.4, pp.581-584
ISSN: 0093-3813
Journal Article
Fraunhofer IWS ()
Nanotechnologie; Kohlenstoff-Schichten; Keramik; Multischicht; Nanomaterialien; Grenzfläche

Hydrogen-free amorphous carbon films with hardness comparable to crystalline superhard materials have been deposited by special pulsed arc techniques. With the combination of very high hardness, hig smoothness, and low adhesion activity to other materials which are in contact with them, these films show superior behavior in wear and slide applications. The influence of plasma and deposition conditions on these film properties and the choice of optimum conditions are discussed.