Photoakustischer Gassensor sowie Verfahren zu seiner Herstellung und Verwendung

(B3) Die Erfindung betrifft einen photoakustischen Gassensor, enthaltend einen Resonanzkoerper und eine Einrichtung zur Erkennung einer Schwingung des Resonanzkoerpers, welche eine Einrichtung zur optischen Erfassung des Ortes von zumindest einer Teilflaeche des Resonanzkoerpers enthaelt, wobei der Resonanzkoerper und die Einrichtung zur Erkennung einer Schwingung auf genau einem Substrat angeordnet sind, und der Resonanzkoerper durch zumindest eine erste Aussparung des Substrates gebildet ist und das Substrat ein Halbleitermaterial enthaelt. Weiterhin betrifft die Erfindung Verfahren zur Herstellung und Verwendung solcher Gassensoren.

DE 102009045724 B3 UPAB: 20110214 NOVELTY - The sensor (1) has an interferometer (30) provided for detecting vibration of a resonance body (11), which enables optical detection of location of a partial surface (116) of the resonance body. The resonance body and the interferometer are arranged on a substrate (50), which comprises semiconductor material. The resonance body is formed of a recess (51) in the substrate. A resonator (70) partially limits certain space for receiving of molecules to be detected. Optical wave guides (32, 42) are integrated on the substrate in silicon-on-insulator technology. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for photo acoustic detection of molecules in a gas phase (2) a method for manufacturing the gas sensor. USE - Photo acoustic gas sensor for photo acoustic detection of presence and/or quantity of molecule species in a gas phase for process controlling in an industrial system e.g. heating system, ventilation system and/or air conditioning system and/or for monitoring carbon-di-oxide, oxygen, nitrogen oxide, nitrogen, ethane and hydrogen in an ambient air and/or for monitoring acetone and respiration alcohol content in a respiratory gas and/or for determining combustion value of combustion gas from an internal combustion engine and biogas from a biogas system and/or for monitoring fire protection and/or for analysis of skin perspiration of a living being for detection of acetonaemia for treatment of diabetes and and/or for quality monitoring and/or for monitoring degree of ripeness of a foodstuff e.g. fruits and vegetables, and/or plants in cooling containers (all claimed). ADVANTAGE - The gas sensor exhibits a compact construction form. The design of the sensor enables acoustic detection of presence and/or quantity of molecule species in the gas phase in a reliable manner. The gas sensor is manufactured in a simple and economical manner.