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Direct fabrication of periodic structures on surfaces. Laser interference patterning as new scalable industrial tool

Direkte Herstellung von periodischen Strukturen auf Oberflächen. Laser Interferenz-Mustererzeugung durch ein neues industrielles Werkzeug
: Lasagni, A.F.; Bieda, M.; Roch, T.; Langheinrich, D.


Laser-Technik-Journal (2011), No.1, pp.45-48
ISSN: 1613-7728
ISSN: 1863-9119
Journal Article
Fraunhofer IWS ()
Interferenz; Lasertechnologie; array; Modulation; Mikrolithographie; Nanolithographie; Metallsubstrat; Tantalcarbid; Reibungskoeffizient

This report introduces a recently development method for the direct fabrication of 2D and 3D structures. The technique involves the modulation of the laser beam intensity by generating interference pattering. By using high power lasers it is possible to directly modify the materials surface obtaining micro- and submicrometer periodic arrays with controlled spatial modulation. Some examples of fabricated structures on metals, polymers well as ta-C layer are discussed.