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Double sided inline diffusion of multicrystalline silicon wafers

: Rinio, M.; Tao, L.; Keipert-Colberg, S.; Borchert, D.


European Commission:
25th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2010. Proceedings : 5th World Conference on Photovoltaic Energy Conversion, 6-10 , September 2010, Valencia, Spain
München: WIP-Renewable Energies, 2010
ISBN: 3-936338-26-4
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <25, 2010, Valencia>
World Conference on Photovoltaic Energy Conversion <5, 2010, Valencia>
Conference Paper
Fraunhofer ISE ()

A new double sided inline diffusion is compared to single sided inline diffusion. We use a Centrotherm inline furnace with its walking string wafer transport system together with a patented liquid phosphorus dopant. Compared to POCl3 emitter diffusion, single sided inline diffusion led often to lower efficiencies. We observed that this efficiency can be raised by a double sided inline diffusion. High resolution light beam induced current (LBIC) topograms show which parts of the solar cell are improved by the double sided diffusion. The effect is investigated for different diffusion temperatures and times.