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2000
Conference Paper
Titel
Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy
Abstract
Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo reference electrode in a three-electrode configuration. Cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS) and scanning electrochemical microscopy (SECM) have been evaluated as tools for rapid on-wafer determination of characteristic device parameters.