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Photon stimulated sensor based on indium oxide nanoparticles I: Wide-concentration-range ozone monitoring in air

: Wang, C.Y.; Becker, R.W.; Passow, T.; Pletschen, W.; Köhler, K.; Cimalla, V.; Ambacher, O.


Sensors and Actuators. B 152 (2011), No.2, pp.235-240
ISSN: 0925-4005
Journal Article
Fraunhofer IAF ()

Ozone sensors are of great demand for monitoring high-concentration ozone for industrial applications and low-concentration ozone for protecting people's health, although commercial ozone sensors are limited in their detection range. In this work, it is demonstrated that compact energy-saving photostimulated ozone sensors based on indium oxide nanoparticles can detect ozone with a dynamical range over four orders of magnitude at room temperature. The photostimulated ozone sensor shows a very low cross response to NO(2), CO, and CO(2). Furthermore, the sensing signal is very reproducible, and no hysteresis effects were found in repeated measurements.