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MEMS based laser display system
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2007
Conference Paper
Titel
MEMS based laser display system
Author(s)
Specht, H.
Kurth, S.
Kaufmann, C.
Gessner, T.
Dötzel, W.
Hauptwerk
Smart systems integration 2007
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
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Fraunhofer-Institut fĂĽr Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM