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Wafer-Level Active Testing of Capacitive Inertial Sensors
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2007
Conference Paper
Titel
Wafer-Level Active Testing of Capacitive Inertial Sensors
Author(s)
Nowack, M.
Reuter, D.
Rennau, M.
Bertz, A.
Gessner, T.
Hauptwerk
MicroNanoReliability 2007, 1st World Congress MicroNanoReliability
Konferenz
World Congress MicroNanoReliability 2007
International Congress on Microreliability and Nanoreliability in Key Technology Applications (MNR) 2007
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM