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MEMS Characterization Technique Based on Special Designed Test-Structures
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2007
Conference Paper
Title
MEMS Characterization Technique Based on Special Designed Test-Structures
Author(s)
Shaporin, A.
Forke, R.
Doetzel, W.
Mehner, J.
Mainwork
MikroSystemTechnik KONGRESS 2007
Conference
MikroSystemTechnik Kongress 2007
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM