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Performance and applications of a two axes fluxgate magnetic field sensor fabricated by a CMOS process

: Grüger, H.; Gottfried-Gottfried, R.

Schneider, C.M.; Müller, K.-H.; Gerlach, G.:
EMSA 2000, 3rd European Conference on Magnetic Sensors and Actuators. Book of abstracts
Dresden: w.e.b.-Universitätsverl., 2000 (Dresdner Beiträge zur Sensorik 13)
ISBN: 3-933592-81-X
European Conference on Magnetic Sensors and Actuators (EMSA) <3, 2000, Dresden>
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Magnetfeldsensor; fluxgate; Monolithische Intergration; CMOS-Kompatibilität; Großer Temperaturbereich

Fluxgate magnetic field sensors offer a wide field of applications in the nT and µT range. The thin film fabrication of the solenoids in the metalization layers and the core in the intermetal dielectrics of a CMOS process has been successfully developed in recent years. Using these monolithic integrated two axes fluxgate magnetic field sensors a system has been built, that enables sensitivities from 5 to 30 mV/µT, optimized for the detection of the earth magnetic field. The operating temperature range from -40 to 125°C and low temperature drifts of typically 100ppm/K arise applications like electronic compasses, detection of the earth magnetic field and its variations (e.g. caused by vehicle traffic) and non destructive testing in a low cost market segment.