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Diamond milling or turning for the fabrication of micro lens arrays: Comparing different diamond machining technologies

: Scheiding, S.; Yi, A.Y.; Gebhardt, A.; Losse, R.; Li, L.; Risse, S.; Eberhardt, R.; Tünnermann, A.


Schoenfeld, W.V. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV : 22.-27.1.2011, San Francisco, California, USA
Bellingham, WA: SPIE, 2011 (Proceedings of SPIE 7927)
ISBN: 978-0-8194-8464-2
Paper 79270N
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" <4, 2011, San Francisco/Calif.>
Conference Paper
Fraunhofer IOF ()
micro lens array; diamond-micro milling; free-form machining; Fast Tool Servo; wafer level manufacturing; diamond turning; mold insert; micro optic

Diamond-micro milling and ultra-precision free-form turning technologies for fabricating micro lens arrays (MLA) with a large number of lenslets are explained in detail and compared. Besides the programming of the toolpath, correction loops and cutting parameters are presented. Both technologies are compared regarding achievable form deviation, roughness and economic factors like machining time. The paper offers a guideline for ultra-precision machining of micro lens array master molds on planar substrates and curved surfaces.