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Mixed oxide coatings for optics

: Stenzel, O.; Wilbrandt, S.; Schürmann, M.; Kaiser, N.; Ehlers, H.; Mende, M.; Ristau, D.; Bruns, S.; Vergöhl, M.; Stolze, M.; Held, M.; Niederwald, H.; Koch, T.; Riggers, W.; Burdack, P.; Mark, G.; Schäfer, R.; Mewes, S.; Bischoff, M.; Arntzen, M.; Eisenkrämer, F.; Lappschies, M.; Jakobs, S.; Koch, S.; Baumgarten, B.; Tünnermann, A.


Applied optics 50 (2011), No. 9, pp.C69-C74
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()

Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties.We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UVapplications have been deposited by PIAD.