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2009
Conference Paper
Titel
Microplasmas for functionalization of surfaces inside small capillaries
Abstract
Functionalization of small and narrow tubings with plasma is a challenge. It is pos-sible with so-called microplasmas which are in the dimension of several mm. Functionaliza-tion with amino-groups is shown exemplary. Therefore experiments were carried with differ-ent mixtures of He and NH3 or He and N2+H2. The optical emission properties of these mix-tures were compared.