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Microplasmas for functionalization of surfaces inside small capillaries

: Panowitz, S.; Mueller, M.; Franzke, J.; Oehr, C.

Keudell, A. von:
19th International Symposium on Plasma Chemistry, ISPC 2009. Online Proceedings : Bochum, July 26 to 31, 2009
Online im WWW, 2009
4 pp.
International Symposium on Plasma Chemistry (ISPC) <19, 2009, Bochum>
Conference Paper
Fraunhofer IGB ()

Functionalization of small and narrow tubings with plasma is a challenge. It is pos-sible with so-called microplasmas which are in the dimension of several mm. Functionaliza-tion with amino-groups is shown exemplary. Therefore experiments were carried with differ-ent mixtures of He and NH3 or He and N2+H2. The optical emission properties of these mix-tures were compared.