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Optical coupling of planar III-V pin photodiodes and SOI waveguides using an integrated BCB prism

: Mörl, L.; Passenberg, W.; Ferstl, M.; Schmidt, D.; Zhang, R.; Aalto, T.; Harjanne, M.; Kapulainen, M.; Ylinen, S.


Institute of Electrical and Electronics Engineers -IEEE-:
22nd International Conference on Indium Phosphide and Related Materials, IPRM 2010. CD-ROM : May 31 2010-June 4 2010, Takamatsu Symbol Tower, Kagawa, Japan
New York, NY: IEEE, 2010
ISBN: 978-1-4244-5921-6
ISBN: 978-1-4244-5919-3
4 pp.
International Conference on Indium Phosphide and Related Materials (IPRM) <22, 2010, Kagawa/Japan>
Conference Paper
Fraunhofer HHI ()

Vertical hybrid integration of photodiodes (PD) and silicon-on-insulator (SOI) waveguides has been investigated. To this end, InP-based planar detectors were used onto which a polymer prism was formed to turn the light beam into the vertical direction. The photodiodes were flip-chip mounted onto a SOI waveguide platform using thermo-compression bonding. Comparable high responsivity of around 0.75 A/W was obtained when light was coupled directly into the prism as well as via a SOI waveguide. The responsivity for SOI integrated PDs was found to depend only to a minor extent on input wavelength and polarization. PD bandwidth of up to 10 GHz was measured. The investigated optical coupling scheme proved to work well also when integrating a PD with an array of ten SOI waveguides which are combined with a star coupler.