Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Dynamic characterization of thin aluminum nitride microstructures
:
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V. | Physica status solidi. C 8 (2011), No.2, pp.479-481
ISSN: 1610-1634
ISSN: 1610-1642
ISSN: 1862-6351 |
| International Symposium on Compound Semiconductors (ISCS) <37, 2010, Takamatsu> |
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| German |
| Journal Article, Conference Paper |
| Fraunhofer IAF () |
Abstract
In this work we report on the mechanical and material properties of membranes made of AlN and nanodiamond for the use in tunable micro-optics. AlN membranes with and without metal contacts have been studied in dynamic mode by laser Doppler vibrometry.