Abstract
We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data reveals the transport to be dominated by Poole–Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling at high fields.