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In situ thickness determination of multilayered structures using single wavelength ellipsometry and reverse engineering

 
: Rademacher, D.; Vergöhl, M.

Optical Society of America -OSA-, Washington/D.C.:
Optical Interference Coatings 2010. CD-ROM : Topical meeting and tabletop exhibit, June 6-11, 2010, Tucson, Arizona, USA. Technical digest
Washington, DC: OSA, 2010
ISBN: 978-1-55752-891-9
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2010, Tucson/Ariz.>
English
Conference Paper
Fraunhofer IST ()

: http://publica.fraunhofer.de/documents/N-151628.html